Single Substrate Clean Oven
There is consistent temperature distribution, a clear level, and a fume countermeasure in the Single Substrate Clean Oven. Many innovations, such as a system to avoid fumes in the oven, time reduction measures at temperature increase and fall, shortening of maintenance time, and so on, have been incorporated to enhance the equipment. The Single Substrate Clean Oven is used in a variety of applications, including colour filter, seal cure, alley process, touch panel and various others.
To enlarge equipment many improvements such as mechanism to prevent fume in.
Oven a measures for time reduction at temperature rise and fall, shortening of maintenance time and etc have been added.
System that includes Loader, Unloader, multiple chambers and cooling system by robot is available. (Robot teaching is included)
Clean level class 100 inside oven
Application : Seal cure, color filter, Touch panel, Array process, and others
Size : G2-G6 (-G8 with subcontructor) *200x200-2000x2000 mm
Note: Monthly Production Capacity: 2 depending on size and specification *standard delivery time : 4 months
Thickness is independent on length and width.